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Publikace

Samuel Paul David, Petr Navrátil, Martin Hanuš, Venkatesan Jambunathan, Martin Divoký, Antonio Lucianetti, Tomáš Mocek

Alexander V. Bulgakov, Jiří Beránek, Vladimir A. Volodin, Yuzhu Cheng, Yoann Levy, Siva S. Nagisetty, Martin Zukerstein, Alexander A. Popov, Nadezhda M. Bulgakova

Silicon–germanium multilayer structures consisting of alternating Si and Ge amorphous nanolayers were annealed by ultrashort laser pulses at near-infrared (1030 nm) and mid-infrared (1500 nm) wavelengths. In this paper, we investigate the effects of the type of substrate (Si or glass), and the number of laser pulses (single-shot and multi-shot regimes) on the crystallization of the layers. Based on structural Raman spectroscopy analysis, several annealing regimes were revealed depending on laser fluence, including partial or complete crystallization of the components and formation of solid Si–Ge alloys. Conditions for selective crystallization of germanium when Si remains amorphous and there is no intermixing between the Si and Ge layers were found. Femtosecond mid-IR laser annealing appeared to be particularly favorable for such selective crystallization. Similar crystallization regimes were observed for both single-shot and multi-shot conditions, although at lower fluences and with a lower selectivity in the latter case. A theoretical analysis was carried out based on the laser energy absorption mechanisms, thermal stresses, and non-thermal effects.

I. Mirza, D. McCloskey, W. J. Blau, J. G. Lunney

A V Bulgakov, I Mirza, N M Bulgakova, V P Zhukov, R Machulka, O Haderka, E E B Campbell, T Mocek

2018 — Journal of Physics D: Applied Physics, Volume 51, Number 25

DOI — http://dx.doi.org/10.1088/1361-6463/aac56a

https://iopscience.iop.org/article/10.1088/1361-6463/aac56a

Sergey V Starinskiy, Alexander V Bulgakov, Elizaveta Ya Gatapova, Yuri G Shukhov, Veronica S Sulyaeva, Nikolay I Timoshenko

2018 — Journal of Physics D: Applied Physics, Volume 51, Number 25

DOI — http://dx.doi.org/10.1088/1361-6463/aac641

https://iopscience.iop.org/article/10.1088/1361-6463/aac641

Esrom Kifle, Pavel Loiko, Carolina Romero, Javier Rodríguez Vázquez de Aldana, Airán Ródenas, Venkatesan Jambunathan, Viktor Zakharov, Andrey Veniaminov, Antonio Lucianetti, Tomas Mocek, Magdalena Aguiló, Francesc Díaz, Uwe Griebner, Valentin Petrov, Xavier Mateos

Ondřej Novák, Peter R. Krogen, Tobias Kroh, Tomáš Mocek, Franz X. Kärtner, Kyung-Han Hong

O. Novák

2018 — 2018 INTERNATIONAL CONFERENCE LASER OPTICS (ICLO 2018)

DOI — https://doi.org/10.1109/LO.2018.8435797

https://ieeexplore.ieee.org/document/8435797

J. M. Smith, T. J. Butcher, P. D. Mason, K. Ertel, P. J. Phillips, S. Banerjee, M. De Vido, O. Chekhlov, M. Divoky, J. Pilar, W. Shaikh, C. Hooker, A. Lucianetti, C. Hernandez Gomez, T. Mocek, C. Edwards, J. L. Collier

Josep Maria Serres, Pavel Loiko, Venkatesan Jambunathan, Xavier Mateos, Vladimir Vitkin, Antonio Lucianetti, Tomas Mocek, Magdalena Aguiló, Francesc Díaz, Uwe Griebner, Valentin Petrov

David Vojna, Ryo Yasuhara, Hiroaki Furuse, Ondrej Slezak, Simon Hutchinson, Antonio Lucianetti, Tomas Mocek, Miroslav Cech

Xuzhao Zhang, Pavel Loiko, Xavier Mateos, Josep Maria Serres, Junyu Ren, Jiayi Guo, Rui Cheng, Cunyuan Gao, Qing Dong, Venkatesan Jambunathan, Antonio Lucianetti, Tomas Mocek, Elena Vilejshikova, Uwe Griebner, Valentin Petrov, Zhengping Wang, Shiyi Guo, Xinguang Xu, Magdalena Aguilo, Francesc Diaz

Sergey V Starinskiy, Alexander V Bulgakov, Elizaveta Ya Gatapova, Yuri G Shukhov, Veronica S Sulyaeva, Nikolay I Timoshenko, Alexey I Safonov

Jörg Körner, Tilman Lühder, Jürgen Reiter, Ingo Uschmann, Heike Marschner, Venkatesan Jambunathan, Antonio Lucianetti, Tomáš Mocek, Joachim Hein, Malte C. Kaluza

N T Goodfriend, S Y Heng, O A Nerushev, A V Gromov, A V Bulgakov, M Okada, W Xu, R Kitaura, J Warner, H Shinohara, E E B Campbell

A V Bulgakov, I Mirza, N M Bulgakova, V P Zhukov, R Machulka, O Haderka, E E B Campbell, T Mocek

2018 — JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol. 51

DOI — 10.1088/1361-6463/aac56a

https://iopscience.iop.org/article/10.1088/1361-6463/aac56a/meta

Stephan Gräf, Clemens Kunz, Sebastian Engel, Thibault J-Y Derrien, Frank A Müller

2018 — MDPI - Journal - Materials, vol. 11

DOI — https://doi.org/10.3390/ma11081340

https://www.mdpi.com/1996-1944/11/8/1340

Samuel Paul David, Venkatesan Jambunathan, Fangxin Yue, Petr Navratil, Martin Mika, Antonio Lucianetti, Tomas Mocek

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